Agent Name

2,4,6,8-Tetramethylcyclotetrasiloxane

CAS Number

2370-88-9

Formula

C4-H16-O4-Si4

Major Category

Metals

Synonyms

Cyclotetrasiloxane, 2,4,6,8-tetramethyl-; [ChemIDplus] ZTOMCATS Precursor; 1,3,5,7, Tetramethylcyclotetrasiloxane; TMCTS; [Air Products MSDS] UN1993

Category

Metalloids and Compounds

Description

Colorless liquid with an odor like ether; [Air Products MSDS]

Sources/Uses

Used in semiconductor processing; [Air Products MSDS]

Comments

Decomposed by water (may evolve hydrogen gas); An irritant; Harmful by ingestion and skin absorption; [Air Products MSDS] See "Octamethylcyclotetrasiloxane."

Exposure Assessment
Vapor Pressure

7.02 mm Hg

Explanatory Notes

The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s.'

Links to Other NLM Databases
Toxicity Information

Chemical Information

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Related Information in HazMap
Processes

Industrial Processes with risk of exposure: