Agent Name

Tetramethyl ammonium hydroxide

CAS Number

75-59-2

Formula

C4-H12-N.H-O

Major Category

Other Classes

Synonyms

Ammonium, tetramethyl-, hydroxide; Hydroxyde de tetramethylammonium [French]; NMD 3; NMW-W; TMAH; Tetramethylammonium hydroxide; Methanaminium, N,N,N-trimethyl-, hydroxide; [ChemIDplus] UN1835

Category

Bases

Description

Colorless liquid with an ammonia-like odor; [CAMEO]

Sources/Uses

In semiconductor manufacturing, TMAH is used to "develop" the pattern in the photoresists; [CHS, p. 44]

Comments

May cause burns and eye damage; At high concentrations, may cause cough, wheezing, and fluid in the lungs; [CSH, p. 405] A very strong base that forms corrosive alkaline solutions; [CHEMINFO-MSDS] A corrosive substance that can cause injury to the skin, eyes, and respiratory tract; [CAMEO]

Adverse Effects
Toxic Pneumonitis

Yes

Dermatotoxin

Skin Burns

Links to Other NLM Databases
Toxicity Information

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Chemical Information

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Related Information in HazMap
Processes

Industrial Processes with risk of exposure: