Agent Name

Hexamethyldisilazane

CAS Number

999-97-3

Formula

C6-H19-N-Si2

Major Category

Metals

Synonyms

Bis(trimethylsilyl)amine; Disilazane, 1,1,1,3,3,3-hexamethyl-; 1,1,1,3,3,3-Hexamethyldisilazane; HMDS; Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-; SZ 6079; Tri-Sil; TSL 8802; [ChemIDplus] UN1993

Category

Metalloid Compounds (Silicon)

Sources/Uses

Used to deactivate chromatography support materials and to promote adhesion of photoresists in the electronics industry; [HSDB]

Comments

Corrosive to skin; [Quick CPC] Reacts with water to release ammonia; Liquid can cause skin burns and eye damage; Vapors can cause respiratory tract irritation and lung damage; [CSH, p. 227] A skin and eye irritant; [CAMEO]

Exposure Assessment
Vapor Pressure

13.8 mm Hg

Lethal Concentration

LC50 (rat) =8,700 mg/m3/4h

Explanatory Notes

Flash point = 27 deg C;

Adverse Effects
Toxic Pneumonitis

Yes

Dermatotoxin

Skin Burns

Links to Other NLM Databases
Health Studies

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Toxicity Information

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Chemical Information

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Related Information in HazMap
Processes

Industrial Processes with risk of exposure: