Agent Name

Trichlorosilane

CAS Number

10025-78-2

Formula

Cl3-H-Si

Major Category

Toxic Gases & Vapors

Synonyms

Silane, trichloro-; Silici-chloroforme [French]; Siliciumchloroform [German]; Silicochloroform; Silicon chloride hydride (SiHCl3); Trichloorsilaan [Dutch]; Trichloromonosilane; Trichlorsilan [German]; Triclorosilano [Italian] [ChemIDplus] UN1295

Category

Chlorosilanes

Description

Colorless fuming liquid with a pungent odor; [ICSC]

Sources/Uses

Used to make silicon for semiconductors; [HSDB] Used to make high-purity silicon and silane adhesion promoters, coupling agents, and silicon resins; [AIHA]

Comments

Reacts with water to release HCl; Corrosive to skin and can produce pneumonitis after inhalation of high concentrations; May ignite on exposure to air; [CSH, p. 418] Highly corrosive to skin; [Quick CPC] A lachrymator; [HSDB] See the Process, "Toxic Gas from Spilling Chemical in Water."

Exposure Assessment
Dangerous When Wet

Yes - A material that, by contact with water, is liable to become spontaneously flammable or to give off flammable or toxic gas at a rate greater than 1 L per kilogram of the material, per hour; [ERG 2004]

WEEL

Ceiling = 0.5 ppm

Vapor Pressure

594 mm Hg

Lethal Concentration

LCLo (rat) = 500 ppm/4h

Explanatory Notes

Flash point = -14 deg C;

Reference Link

ICSC: Trichlorosilane

Flammability (NFPA)

4: Burns readily

Adverse Effects
Lacrimator

Yes

Toxic Pneumonitis

Yes

Dermatotoxin

Skin Burns

Links to Other NLM Databases
Health Studies

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Toxicity Information

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Related Information in HazMap
Diseases

Occupational diseases associated with exposure to this agent:

Processes

Industrial Processes with risk of exposure: