Agent Name

Hexachlorodisilane

CAS Number

13465-77-5

Formula

Cl6-Si2

Major Category

Toxic Gases & Vapors

Synonyms

Disilane, 1,1,1,2,2,2-hexachloro-; Disilane, hexachloro-; [ChemIDplus] Disilane hexachloride; Disilicon hexachloride; 1,1,1,2,2,2-Hexachlorodisilane; Silicon chloride; [Matheson Tri-Gas MSDS] UN2987

Category

Chlorosilanes

Description

Clear to straw-colored liquid with an acrid odor of hydrogen chloride; [Matheson Tri-Gas MSDS]

Sources/Uses

Used in semiconductor processing; [Matheson Tri-Gas MSDS]

Comments

May form explosive byproducts on prolonged storage; May explode on contact with water; Readily hydrolyzes forming hydrochloric acid; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract and lungs; [Matheson Tri-Gas MSDS]

Exposure Assessment
TIH

Yes

Dangerous When Wet

Yes - A material that, by contact with water, is liable to become spontaneously flammable or to give off flammable or toxic gas at a rate greater than 1 L per kilogram of the material, per hour; [ERG 2004]

Explanatory Notes

Vapor pressure = 12 mm Hg at 40 deg C; [Matheson Tri-Gas MSDS] The Guide in the Emergency Response Guidebook is for "Chlorosilanes, corrosive, n.o.s." Not TIH in land-based spills, but TiH substance released when spilled in water; [ERG 2016]

Adverse Effects
Toxic Pneumonitis

Yes

Dermatotoxin

Skin Burns

Links to Other NLM Databases
Toxicity Information

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Chemical Information

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Related Information in HazMap
Diseases

Occupational diseases associated with exposure to this agent:

Processes

Industrial Processes with risk of exposure: