Agent Name

Phosphorus pentafluoride

CAS Number

7647-19-0

Formula

F5-P

Major Category

Toxic Gases & Vapors

Synonyms

Pentafluorophosphorane; Phosphorane, pentafluoro-; Phosphorus fluoride (PF5); Phosphorus, fluoride, penta-; UN2198; [ChemIDplus]

Category

Corrosive Gases

Description

Colorless gas with an unpleasant odor; [HSDB]

Sources/Uses

Used as a catalyst, a fluorinating agent, and a source of phosphorus for ion implantation in semi-conductor manufacturing; [HSDB]

Comments

Corrosive to the skin and eyes; Inhalation may cause pulmonary edema; Liver injury may occur after poisoning by ingestion; [HSDB] Reacts with moisture in air to generate phosphoric acid and hydrogen fluoride; [CAMEO]

Exposure Assessment
TIH

Yes

TLV (ACGIH)

2.5 mg/m3, as F

PEL (OSHA)

2.5 mg/m3, as F

MAK

1 mg/m3, as F, inhalable fraction

Explanatory Notes

For occupational exposure limits, see "Fluorides."

Adverse Effects
Toxic Pneumonitis

Yes

Hepatotoxin

Hepatotoxin, Secondary

Dermatotoxin

Skin Burns

Links to Other NLM Databases
Health Studies

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Toxicity Information

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Chemical Information

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Related Information in HazMap
Diseases

Occupational diseases associated with exposure to this agent:

Processes

Industrial Processes with risk of exposure: