Agent Name

Silicon tetrafluoride

CAS Number

7783-61-1

Formula

F4-Si

Major Category

Toxic Gases & Vapors

Synonyms

Perfluorosilane; Silane, tetrafluoro-; Silicon fluoride (SiF4); Tetrafluorosilane; UN1859; [ChemIDplus]

Category

Corrosive Gases

Description

Colorless gas with a pungent odor; [HSDB]

Sources/Uses

Used to manufacture silane, silicon for electronics, and fluosilicic acid; Used as a sealant in oil well drilling; [HSDB]

Comments

On contact with water, may hydrolyze to form fluosilicic acid and silicon dioxide. May be corrosive to the skin, eyes, and respiratory tract; Inhalation may cause pulmonary edema; Chronic exposure may cause fluorosis; [CHEMINFO MSDS] See "Fluorosilic acid." See "FLUORIDES."

Exposure Assessment
BEI

Fluorides in urine = 2 mg/L prior to shift or 3 mg/L at end of shift; (Repeated measurements recommended.)

TIH

Yes

TLV (ACGIH)

2.5 mg/m3, as F

PEL (OSHA)

2.5 mg/m3, as F

MAK

1 mg/m3, as F, inhalable fraction

Lethal Concentration

LC50 (rat) = 2,272 ppm

Explanatory Notes

For occupational exposure limits, see "Fluorides."

Adverse Effects
Toxic Pneumonitis

Yes

Dermatotoxin

Skin Burns

Links to Other NLM Databases
Health Studies

Human Health Effects from Hazardous Substances Data Bank:

Toxicity Information

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Chemical Information

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Biomedical References

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Related Information in HazMap
Diseases

Occupational diseases associated with exposure to this agent:

Processes

Industrial Processes with risk of exposure: