Agent Name

Tetramethylsilane

CAS Number

75-76-3

Formula

C4-H12-Si

Major Category

Metals

Synonyms

Silane, tetramethyl-; Tetramethyl silane; Silicon, tetramethyl-; Tetramethylsilicane; [ChemIDplus] Silicon tetramethyl; TMS; [Merck Index] Z4MS CVD Precursor; [Air Products MSDS] UN2749

Category

Metalloid Compounds (Silicon)

Description

Liquid; bp = 26.6 deg C; [Merck Index] Colorless odorless liquid; [Air Products MSDS]

Sources/Uses

Used as NMR reference standard, in semiconductor chemical vapor deposition, and for silylation of samples for GC analysis; [Merck Index] Used as an aviation fuel; [CAMEO] Used in semiconductor processing; [Air Products MSDS]

Comments

Pyrophoric; No adverse effects observed in combined subchronic/reproductive/developmental inhalation study of rats at concentrations up to 5,000 ppm/6 hours/day; [HSDB] A mild irritant; Inhalation of vapor may cause nose, throat, and lung irritation and pose an asphyxiation hazard; Harmful by ingestion; [Air Products MSDS] See "Diethylsilane."

Exposure Assessment
Vapor Pressure

718 mm Hg

Flammability (NFPA)

3: May ignite at ambient temperature

Adverse Effects
Other Poison

Simple Asphyxiant

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