Agent Name

Trimethylfluorosilane

CAS Number

420-56-4

Formula

C3-H9-F-Si

Major Category

Toxic Gases & Vapors

Synonyms

Fluorotrimethylsilane; Silane, fluorotrimethyl-; [ChemIDplus] Trimethylsilyl fluoride; [Alfa Aesar MSDS] UN3309

Category

Fluorosilanes

Description

Liquefied gas with a pungent irritating odor; [Alfa Aesar MSDS]

Comments

Hydrolyzed by moisture evolving hydrogen fluoride; Causes burns; Inhalation may cause corrosive injuries to the respiratory tract and pulmonary edema; [Alfa Aesar MSDS] See "Methyltrifluorosilane" and "Difluorodimethylsilane."

Exposure Assessment
TIH

Yes

Explanatory Notes

The Guide in the Emergency Response Guidebook is for "Liquefied gas, toxic, flammable, corrosive, n.o.s."

Adverse Effects
Toxic Pneumonitis

Yes

Dermatotoxin

Skin Burns

Links to Other NLM Databases
Toxicity Information

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Chemical Information

Search ChemIDplus

Related Information in HazMap
Diseases

Occupational diseases associated with exposure to this agent: