Agent Name

Bis(dimethylamino)dimethylsilane

CAS Number

3768-58-9

Formula

C6-H18-N2-Si

Major Category

Metals

Synonyms

Silanediamine, hexamethyl-; Silanediamine, N,N,N',N',1,1-hexamethyl-; [ChemIDplus] DIMETHYLBIS(DIMETHYLAMINO)SILANE; [Matheson Tri-Gas MSDS] UN2924

Category

Metalloid Compounds (Silicon)

Description

Clear to straw-colored liquid with an acrid amine odor; [Matheson Tri-Gas MSDS]

Sources/Uses

Used in electronic film deposition; [Matheson Tri-Gas MSDS]

Comments

Reacts with water/moisture producing dimethylamine; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract; [Matheson Tri-Gas MSDS] See "Bis(dimethylamino)diphenylsilane" and "Bis(dimethylamino)methylvinylsilane."

Exposure Assessment
Vapor Pressure

1 mm Hg

Explanatory Notes

The Guide in the Emergency Response Guidebook is for "Flammable liquid, corrosive, n.o.s."

Adverse Effects
Dermatotoxin

Skin Burns

Links to Other NLM Databases
Toxicity Information

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Chemical Information

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Related Information in HazMap
Processes

Industrial Processes with risk of exposure: