Agent Name

Silicon tetrahydride

Alternative Name

Silane

CAS Number

7803-62-5

Formula

H4-Si

Major Category

Toxic Gases & Vapors

Synonyms

Flots 100SCO; Monosilane; Silane; Silicane; Silicon tetrahydride; [ChemIDplus] UN2203

Category

Hydrides

Description

Colorless, flammable and poisonous gas, with a strong repulsive odor; [CAMEO]

Sources/Uses

Used as a source of silicon for semiconductors in the microelectronics industry; [ACGIH]

Comments

Silicon tetrahydride may ignite spontaneously in air. Toxicology data is extremely limited. The TLV is based on the subacute effects in rodents at 1000 ppm. Silane has low acute toxicity in inhalation animal experiments. The estimated LC50 is between 5,000 and 10,000 ppm for 4-hour exposures. [ACGIH] Explosions, fire, and asphyxiation in confined spaces are the most important hazards of silane. [Sullivan, p. 962] A skin, eye, and respiratory tract irritant; Evaporating liquid can cause frostbite; [ICSC]

Exposure Assessment
Skin Designation (ACGIH)

Insufficient data

TLV (ACGIH)

5 ppm

Lethal Concentration

LC50 (rat) = 9,600 ppm/4h

Adverse Effects
Other Poison

Simple Asphyxiant

Links to Other NLM Databases
Health Studies

Human Health Effects from Hazardous Substances Data Bank:

Toxicity Information

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Chemical Information

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Related Information in HazMap
Diseases

Occupational diseases associated with exposure to this agent:

Processes

Industrial Processes with risk of exposure: