Agent Name

Diethylsilane

CAS Number

542-91-6

Formula

C4-H12-Si

Major Category

Metals

Synonyms

Silane, diethyl-; [ChemIDplus] UN1993

Category

Metalloid Compounds (Silicon)

Description

Liquid; [Merck Index] Clear colorless liquid; [MSDSonline]

Sources/Uses

Used in semiconductor processing; [MSDSonline]

Comments

An irritant; Highly flammable; "Organic silicon compounds are generally of low toxicity." Acute and chronic toxicity not fully known; [Alfa Aesar MSDS]

Exposure Assessment
Vapor Pressure

207.52 mm Hg

Explanatory Notes

The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s."

Links to Other NLM Databases
Toxicity Information

Search TOXNET

Chemical Information

Search ChemIDplus

Related Information in HazMap
Processes

Industrial Processes with risk of exposure: