Agent Name

Vinyltrimethylsilane

CAS Number

754-05-2

Formula

C5-H12-Si

Major Category

Metals

Synonyms

(Trimethylsilyl)ethylene; Silane, ethenyltrimethyl-; Silane, trimethylvinyl- (8CI); Trimethylvinylsilane; [ChemIDplus] TMVS; Ethenyltrimethylsilane; [Air Products MSDS] Trimethyl(vinyl)silane; [Aldrich MSDS] UN1993

Category

Metalloid Compounds (Silicon)

Description

Clear liquid with an unpleasant odor; [Air Products MSDS]

Sources/Uses

Used in semiconductor processing; [Air Products MSDS]

Comments

Flammable; A mild irritant; May decompose to form flammable or explosive mixtures with air; Lethal-dose study of rats at 2,000 mg/kg produced diarrhea on the day of administration and no deaths; Lethal-concentration study of rats at 20,030 mg/m3 (4,886 ppm) caused no clinical signs of toxicity or irritation and no deaths; [Air Products MSDS] May contain up to 3% tetrahydrofuran (with BHT inhibitor) as residual impurity of production; Highly flammable; An irritant; Harmful by ingestion; Targets kidneys, liver, and CNS; [Aldrich MSDS]

Exposure Assessment
Lethal Concentration

LC50 (rat) > 20,030 mg/m3

Explanatory Notes

The Guide in the Emergency Response Guidebook is for "Flammable liquid, n.o.s."

Links to Other NLM Databases
Toxicity Information

Search TOXNET

Chemical Information

Search ChemIDplus

Related Information in HazMap
Processes

Industrial Processes with risk of exposure: