Agent Name | Silicon tetrafluoride |
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CAS Number | 7783-61-1 |
Formula | F4-Si |
Major Category | Toxic Gases & Vapors |
Synonyms | Perfluorosilane; Silane, tetrafluoro-; Silicon fluoride (SiF4); Tetrafluorosilane; UN1859; [ChemIDplus] |
Category | Corrosive Gases |
Description | Colorless gas with a pungent odor; [HSDB] |
Sources/Uses | Used to manufacture silane, silicon for electronics, and fluosilicic acid; Used as a sealant in oil well drilling; [HSDB] |
Comments | On contact with water, may hydrolyze to form fluosilicic acid and silicon dioxide. May be corrosive to the skin, eyes, and respiratory tract; Inhalation may cause pulmonary edema; Chronic exposure may cause fluorosis; [CHEMINFO MSDS] See "Fluorosilic acid." See "FLUORIDES." |
Exposure Assessment | |
BEI | Fluorides in urine = 2 mg/L prior to shift or 3 mg/L at end of shift; (Repeated measurements recommended.) |
TIH | Yes |
TLV (ACGIH) | 2.5 mg/m3, as F |
PEL (OSHA) | 2.5 mg/m3, as F |
MAK | 1 mg/m3, as F, inhalable fraction |
Lethal Concentration | LC50 (rat) = 2,272 ppm |
Explanatory Notes | For occupational exposure limits, see "Fluorides." |
Adverse Effects | |
Toxic Pneumonitis | Yes |
Dermatotoxin | Skin Burns |
Links to Other NLM Databases | |
Health Studies | Human Health Effects from Hazardous Substances Data Bank: |
Toxicity Information | |
Chemical Information | |
Biomedical References | |
Related Information in HazMap | |
Diseases | Occupational diseases associated with exposure to this agent: |
Processes | Industrial Processes with risk of exposure: |